TEL Alpha-8SE

Process: UNDOPED-POLY
INSPECTION DATE 2024-08-21

General Info
1 System Layout Main , Utility
2 System Type L-Type
3 Side Maintenance Installed
4 System Paint Color Ivory
5 Furnace Front Surface Finish SUS
6 Heater Model VOS-40-017
7 Rapid Cooling Unit MISSING
8 N2 Load Lock -
9 O2 Analyzer Installed / LC750
10 Cassette I/O Type (Normal / SMIF) Normal I/O Type
11 SMIF Maker / Model Not Installed
12 AGV Compatibility Unable
13 System Main Controller WAVES
14 Mechanical Controller -
15 Syquenc Controller -
16 Gas Controller -
17 Furnace Temperature Controller -
18 Furnace Overtemp Detector -
19 Host Communications -
20 User Host Computer I/F -
21 Gas Flow Chart Pannel Installed (Front , Rear)
22 Operation Pannel Installed (Front)
23 Signal Tower / Colors Not Installed
24 Gas Detecter Maker / Model RIKEN KEIKI
25 Detecting Gas AsH3
26 Manual (Drawing, Parts list etc) Not Included

Gas system
1 Process Gas N2, SiH4
2 Basic Style Integrated Gas System (Fujikin)
3 Manual Valve Fujikin
4 Air-Operated Valve Fujikin
5 Filter TOSHIBA
6 Regulator VERIFLO
7 MFC Maker / Model UNIT / UFC 1661
8 PT Sensor Maker / Model MKS
9 DPM Maker / Model MKS
10 Check Valve Fujikin
11 Baking System N/A
12 Liquid Source Auto-Refill N/A
13 Burn Controller N/A
14 Veporizer N/A

Vacuum/ exhaust system
1 Pump N/A
2 Pressure Control Valve N/A
3 Pressure Controller N/A
4 Pressure Sensor N/A
5 Trap Not Installed
6 Gas Cooler N/A

Wafer/ cassette handling
1 Wafer Type 200 mm Flatzone Type
2 Auto Wafer Aligner Installed
3 Wafer Qty. in Cassette 26
4 Cassette Storage Qty. 21
5 Fork Type 1 + 4
6 Fork-Wafer Presence Sensor Installed
7 Fork-Variable Pitch Installed
8 Magnetic Seal Rotation Installed