TEL Lithius

Ref : 2714821-9-CP

Condition : Used

Manufacturer : TEL

Model : Lithius

Year(s) : 2005

Quantity : 1

Location : Seller or machines location:
EUROPE (Western and Northern)

Wafer size 300mm
Tool Status Running Wafers
Fab Section Lithography
Asset Description 2-Block-Machine
Software Version 300.0.130.2
CIM SECS
Process Coat, Development
Main System Lithius 2-Block 1 OK
Handler System TEL robot (CRA/PRA_3x/IRAM/IRAS) OK
Factory Interface FOUP 5
Coater Cabinet 1 OK
Temp./ Hum.Controller 2 OK
Resist Cabinet 1 OK
Developer Cabinet 1 OK
PowerBox 1

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