TEL, Tokyo Electron Alpha 8S-Z (AP)

Vertical Furnace Oxide Process
Version: 200 mm
Vintage: 01.08.1999

Comments:
1 Process Oxide
2 Wafer Size 200mm
3 Process Wafer Qty XXX
4 Process Type Oxide
5 I/O Port / Smif I/O port
6 Load Lock NO
7 Carrier Slot 25 Slot
8 boat type Two boat

System Control
1 System Controller WAVES
2 Operation Screen Touch Screen
3 Gas Flow Chart (Front & Rear)
4 Temperature Controller M560
5 Vacuum Pressure Control N/A
6 Controller Transformer 1 PHASE 100V
7 Heater Transformer 3 PHASE 440V
8 Oxygen Analyzer N/A
9 HEC Pyro Ctl YES
10 RCU BOX YES
11 Power BOX YES

Process Gas Configuration
1 Process Gas 1 N/A
2 Process Gas 2 N2 30SLM
3 Process Gas 3 O2 10SLM
4 Process Gas 4 O2 30SLM
5 Process Gas 5 O2 10SLM
6 Process Gas 6 N/A
7 Process Gas 7 H2 10SLM
8 Process Gas 8 HCL 3SLM
9 Process Gas 9 N2 5SLM
10 Process Gas 10 N2 5SLM

Gas Distribution System
1 Basic Style Conventional
2 Tubing Material SUS-316L
3 Tubing Finish VCR
4 Manual Valve N/A
5 Air-Operated Valve Fujikin
6 MFC STEC

Exhaust Distribution System
1 Air-Operated Valve Type VCR Connect
2 Main Valve Fujikin
3 Cold Trap NO
4 Pump Line NO

Wafer/Cassette Handling
1 Wafer Alignment NO
2 Cassette Storage Qty 12
3 Cassette In/Out Port YES
4 Cassette Handling Robot YES
5 Wafer Transfer Type 1
6 Fork Material Not known
7 Fork Qty 1
8 Fork Variable Pitch NO
9 Fork Wafer Presence Sensor NO

Elevator Handling
1 Boat Elevator YES
2 Auto Shutter YES
3 Boat Rotation YES
4 Mechanical Parts YES

Heating Chamber
1 Heater Type VOS-40-107 (FTPS)
2 T/C Type 4
3 Spike T/C 4