TEL, Tokyo Electron Lithius

Photoresist Coater and Developer Track
Version: 300 mm
Vintage: 01.06.2007

-Has CE mark
-Still installed and operational
-Can be demoed by appointment
-It is scheduled to be released for sale around December 2023.
-It can be booked for purchase now by paying a deposit.
-Price is open to your best offer.
-Right to left flow.
-Fitted with 1 DEV , 1 TCT, 1 ITR , 2 ICT, 1 BCT, 1 COT
-Please refer to the attached photos showing also block diagram.

Number of nozzles each unit:
2-2 ITC Resist 2 nozzles
2-3 Cot Resist 9 nozzles
2-4 BCT Resist 4 nozzles
2-5 ITC Resist 3 nozzles
3-2 ITR RRC Nozzle (Immersion Remover)
3-3 TCT Resist 2 nozzles
3-4 DEV
3-5 SRS

Here follows a key explaining the abbreviation of the units:
Spin Tower(Common)
Coat Process Station(Common) : COT
Coat Process Station(Each module) : COT
Bottom Anti Reflection Coat Process Station(Common) : BCT
Bottom Anti Reflection Coat Process Station(Each module) : BCT
Top Anti Reflection Coat Process Station(Common) : TCT
Top Anti Reflection Coat Process Station(Each module) : TCT
Immersion Top Coat Process Station(Common) : ITC
Immersion Top Coat Process Station(Each module) : ITC
Immersion Top Remove Process Station(Common) : ITR
Immersion Top Remove Process Station(Each module) : ITR