Tepla 4011

Etcher Type Planar - Magnetron
Rated Power Output 4000 Watts
Reactor Center Rectangular
Reactor Center Size
Width 32.28 in (81.99 cm)
Depth 27.80 in (70.61 cm)
Height 5.43 in (13.79 cm)
Reactor Center Material Aluminum
Number of Gas Inputs Four Gas
Automatching Network Included No
Vacuum Pump Included No
RF Generator Model Muegge MX2000D-110LE
External Cooling Water Cooled
Accessories

This Tepla system uses European Power 400v 3phase. Included with this unit is a power supply transfomer that converts US 480 3phase to EURO 400v 3phase needed by this system.
Other Information

Specification
Process chamber:
Material Aluminum
Width 820 mm
Height 138 mm
Depth 706 mm
Chamber door: Aluminum, quartz inspection window with ultraviolet and
high-frequency radiation protection
Vacuum system
Process pressure: Approx. 0.1 - 1 mbar
Gas and vacuum piping: High-grade steel, ¼“ Swagelok connections as well as
aluminum KF components
Gas supply: 2 - 4 separate gas ducts (2 option, metering by means
of mass-flow controller
Venting: By means of solenoid valve and series throttle valve

Vacuum
Ultimate pressure attainable: Approx. 0.01 mbar
Vacuum measurement: Capacitive pressure gauge
measuring range from 0.01 to 10 mbar
The suction system is located in the bottom of the chamber.
Electro-pneumatic valve DN 65 ISO-K in suction line. (Optional)

Dimensions:
Height: approx. 1720 mm
Width: approx. 1615 mm
Depth: approx. 950 mm
Weight: approx. 800 kg

Recommended pump equipment
Rotary-vane oil pump, two-stage, filled with PFPE oil
Minimum suction capacity 65 m3 / h
Exhaust filter with oil return
1 meter flexible metal tubing DN 65 ISO-K with connection components
Microwave generator
Regulated Magnetron
Frequency: 2.45 GHz
Power output: 2 x 2000 watts
Fault monitoring: Overload protection
Control unit
Display of:
• Process time
• HF output
• Process pressure
• Gas flow
Hardware:
• Centronics printer interface
• PC keyboard with Trackball
• RS 232