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Tokyo Electron Tactras Vesta
Ref :
2715131-9-CP
Condition :
Used
Manufacturer :
Tokyo Electron
Model :
Tactras Vesta
Year(s) :
2014
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Wafer size: 300mm
Asset HDD not included
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: VESTANV4
Process: POLY
System Power Rating: 208 VAC
Loading Configuration: 3 load port
Chm/Unit Position 1: VESTANV4; Chemicals / Gases Used: HBr, CH2F2, NF3, SF6
Chm/Unit Position 2: VESTANV4:Chemicals / Gases Used: HBr, CH2F2, NF3, SF6
Chm/Unit Position 3: RT3
Chm/Unit Position 4: RT3
Chm/Unit Position 5: VESTANV4; Chemicals / Gases Used: HBr, CH2F2, NF3, SF6
Chm/Unit Position 6: VESTANV4; Chemicals / Gases Used: HBr, CH2F2, NF3, SF6
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