ZEISS LM100 Inspection Microscope

Zeiss inspection microscope for large wafers and panels with reflected and transmitted light
Brightfield, darkfield, Nomarski (DIC) inspection
Merzhauser motorized xy stage with 550mm x 550mm travel (21.6"x21.6")
Stage dimensions 575mm x 700mm. Opening in stage 305mm x 445mm
Distance between granite supports 49 inches.
Axiotron 2 microscope configured for brightfield, darkfield, and DIC with motorized polarizer
Motorized nosepiece rotation with Epifluor HD DIC objectives 5/10/20/50/100x
6 place motorized nosepiece with Nomarski prisms for DIC
12v/100w lamphouse for reflected light
transmitted light source with Zeiss KL1500 fiber optic power supply