Used Semiconductor Equipment

Head: Micro Head 5 - sr(13, 65, 327㎛ Range) Lens Objective: Lens:6.4X , Magnification Range:300X~1012X Load Ch Year(s) : 0 Location : ASIA (North East)

Price : On request

- Long Scan Profiler P-11 Measurement. - Micro Head sr with Orange stylus. - Measurement Range: 13㎛,65㎛,327㎛. Year(s) : 1997 Location : ASIA (North East)

Price : On request

- Cassette Handling - Laser: Circumferential(50mW, 405nm), Radial(85mW, 660nm) - Spot size: 5㎛ x 4㎛. - Handler Year(s) : 2012 Location : ASIA (North East)

Price : On request

Broadband spectrometry for film thickness and trench profile measurements on photomask reticles. Spotsize: R = Year(s) : 2005 Location : ASIA (North East)

Price : On request

- Standard Head with L(yellow) type stylus. - Measurement Range: 13㎛,300㎛. - Scan Length: 210mm. - Scan Speed Year(s) : 1995 Location : ASIA (North East)

Price : On request

Capable up to 12" Wafer ■ SSM 52 Capacitance Measurement Unit ■ Motor control unit ■ Pneumatic control Unit ■ Year(s) : 2010 Location : ASIA (North East)

Price : On request

- Cassette Handling - Laser: Circumferential(50mW, 405nm), Radial(85mW, 660nm) - Spot size: 5㎛ x 4㎛. - Handler Year(s) : 2011 Location : ASIA (North East)

Price : On request

- Laser: Circumferential(50mW, 405nm), Radial(85mW, 660nm) - Spot size: 5㎛ x 4㎛. - Particle detection: smaller Year(s) : 2011 Location : ASIA (North East)

Price : On request

*.Measurement -Wafer: 8" -Speed: 5 sec. for 150mm wafer. -Range: 2x10E7 ~ 4x10E7 dyne/cm2 -RMS Noise: 0.0001 m Year(s) : 1993 Location : ASIA (North East)

Price : On request

Configuration: - Wafer Size : 4 - 8 inch. - Non-patterned surface Inspection System. - 0.1 micron Defect Sensi Year(s) : 1995 Location : ASIA (North East)

Price : On request

*. Fully refurbished. *. Installed in Clean-room. *. Can demonstrate any time. Wafer Size 8" Location : ASIA (North East)

Price : On request

Measurement Range : 25?- 20탆 - 500?-200 um with the visible light source (400 to 800nm halogen lamp) - 25?- 50 Year(s) : 2007 Location : ASIA (North East)

Price : On request

Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silico Location : ASIA (North East)

Price : On request

Process: Spreading resistance probe *. Measurement perfomance: - Resistivity and Dopant concentration - Resist Year(s) : 1999 Location : ASIA (North East)

Price : On request

In-lens Field Emission Scanning Electron Microscope. Imgae Resolution : - 0.4nm guaranteed at accelerating vo Location : ASIA (North East)

Price : On request

Microscope : - Model :OLYMPUS MX50A-F - Objectives :5X,10X,20X,50X,150X Motorize objectives 2. Autoloader Location : ASIA (North East)

Price : On request

Brand: SEMILAB SDI/SEMILAB FAaST 200-SL Non contact CV/IV Measurement non-contact electrical C-V & I-V measu Location : ASIA (North East)

Price : On request

Wafer Size 8" Year(s) : 1997 Location : ASIA (North East)

Price : On request

To be refurbished Installed in Clean-room. Wafer Size 8" Year(s) : 1998 Location : ASIA (North East)

Price : On request

SONIX Quantum 350 Scanning Acoustic Microscopy (SAM) Wafer Size 8" Scanning Acoustic Tomography (SAT), also c Year(s) : 2006 Location : ASIA (North East)

Price : On request

AMC 7700 EPI Reactor with Moore Uniformity Kit *. Process: Epilayer growth on silicon wafer *. Operational a Location : ASIA (North East)

Price : On request

Installed in Clean-room. Wafer Size Other Location : ASIA (North East)

Price : On request

Micro manupulator 6400F Manual Probe Station Wafer Size 8" - Micro manupulator Manual Probe Station 6400F - J Location : ASIA (North East)

Price : On request

NIDEK IM-11 5" Wafer Autoloader - Nidek wafer auto loader. - 5" wafer. - Power: 120V, 5A - Utility: Vacuum. Location : ASIA (North East)

Price : On request

N&K 8000 Trench Depth & Thin film thickness Measurement Wafer Size 8" Vintage 2007 Fully Automated Thin Film Year(s) : 2007 Location : ASIA (North East)

Price : On request