SDI Diagnostics FAaST 200 SL
ASIA (North East)
SDI/SEMILAB FAaST 200-SL Non contact CV/IV Measurement
non-contact electrical C-V & I-V measurement system capable of measuring on product wafers.
Measurements can be made in scribe line test sites or in the active cell area.
Cell measurements allow for the first time in-line electrical monitoring of topology related processing issues.
Major applications include measurements of SiO2, Nitrided Oxides, advanced high-K and low-K dielectrics