Ulvac IH-860DSIC

High-temperature Ion Implanter for SiC IH-860PSIC
The Ion Implanter IH-860DSIC is a system especially designed for mass production with high temp ESC for SiC.
It has the following key features:
-Parallel beam high temperature ion implanter for SiC devices
-100mm/150mm wafer available
-up to 500C with hot plate type ESC and pre-heat stage
-Both hot plate ESC and cooling EXC are equipped
-rapid heating and good temperature uniformity
-400keV single / 800keV double / 1.2MeV for triple Charge
-Footprint 7.6m x 3.6m