Tencor FLX-2320

*.Measurement -Wafer: 8" -Speed: 5 sec. for 150mm wafer. -Range: 2x10E7 ~ 4x10E7 dyne/cm2 -RMS Noise: 0.0001 mE-1(radius=10,000 meters) -Resolution:0.00003mE-1(33 kilometers) -Min scan setp: 0.02mm -Max Points Per Scan: 1250 -Min Radius: 2.0m(for 80mm scan length) -Temperature Range: room temperature ~ 500 C *.Light Source: 670nm(4mW), 750nm(4mW) Laser. *.Dimension: 46cm(18")x46cm(18")x56cm(22") plus computer. *.Weight: 45.5Kg *.Utility -Operation temperature: 18~22 C(64~72F) -Gas Connection: Cooling gas(Nitrogen, Class 100 Air) -Power: 230V, 13A, 50/60Hz -Computer: Pentium 100Mhz, 1.2GB HDD, 17" LCD Monitor. *.Intalled in a clean room and can demonstrate any time.