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3 AMAT Centura -Hart

Ref : 2811060-9-W
Condition : Used
Manufacturer : AMAT
Model : Centura -Hart
Year(s) : 2001
Quantity : 3
Location : Seller or machines location:
EUROPE (Western and Northern)

Complete.
Mainframe with 4 chambers. Sale
only as single Parts (Chamber/Mainframe) due to
limited space for deinstallation

Process ANISOTROP
Procedure CUBV

Wafer Size Range
Set Size 200 mm
Number of Chambers 4
Power Requirements 3 Phase
CE Marked YES
Year of Manufacture 2001/ 2001/ 2002
Condition Good
Exterior Dimensions
Width66.929 in (170.0 cm)
Depth96.457 in (245.0 cm)
Height98.031 in (249.0 cm)
Weight4,550 lb (2,064 kg)

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