3 AMAT Centura -Hart
Ref :
2811060-9-W
Condition :
Used
Manufacturer :
AMAT
Model :
Centura -Hart
Year(s) :
2001
Quantity :
3
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Complete.
Mainframe with 4 chambers. Sale
only as single Parts (Chamber/Mainframe) due to
limited space for deinstallation
Process ANISOTROP
Procedure CUBV
Wafer Size Range
Set Size 200 mm
Number of Chambers 4
Power Requirements 3 Phase
CE Marked YES
Year of Manufacture 2001/ 2001/ 2002
Condition Good
Exterior Dimensions
Width66.929 in (170.0 cm)
Depth96.457 in (245.0 cm)
Height98.031 in (249.0 cm)
Weight4,550 lb (2,064 kg)
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