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ADE EpiScan 1000 Epi Film Thickness Mapping Tool
Ref :
2807166-9-A
Condition :
Used
Manufacturer :
ADE
Model :
EpiScan 1000 Epi Film Thickness Mapping Tool
Short Description :
-
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
ADE EpiScan 1000 FT-IR epitaxial film-thickness measurement
and mapping tool for non-destructive measurement of
epi films under 25 microns.
- Handles 100 mm to 200 mm wafers
- Cassette-to-cassette with automatic scanning stage and full wafer mapping
- ON-LINE Technologies 2110 spectrometer head
- Irvine Optical AutoLoader II dual-cassette wafer handler with prealigner
- ADE PC controller running Windows NT
- Power: 120 V
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Year(s) :
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