Advanced Plasma Systems B Series-4

Etcher Type Box
Rated Power Output 5000 Watts
Reactor Center Rectangular
Reactor Center Size
Width 30.00 in (76.20 cm)
Depth 30.00 in (76.20 cm)
Height 36.00 in (91.44 cm)
Reactor Center Material Aluminum
Number of Gas Inputs Three Gas
Vacuum Pump Included Yes
Vacuum Pump Model Stokes Blower 615-2 with Stokes 149-11 pump
RF Generator Model Advanced Energy PEII 5K
Panel Meters Digital
External Cooling Water Cooled
Accessories
Gas Delivery: (3) MKS MFCs, 2000 SCCM each
MKS 947 vacuum gauge
Stokes oil fiter: Model LFI1K3HPXG874
Thermal Transfer Products heat exchanger: Model AW-25-80759
Viewing window

Other Information
Four shelves: Shelf size 21.375 x 27.25"
P2CIM 2000 Win NT Software version 4.09a

Power Requirements 208 V 100.0 A 60 Hz 3 Phase
Year of Manufacture 2000
Exterior Dimensions
Width 86.000 in (218.4 cm)
Depth 38.000 in (96.5 cm)
Height 83.000 in (210.8 cm)
Weight 2,146 lb (973 kg)