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Allwin21

Ref : 1841298-9-W
Condition : Used
Manufacturer : Allwin21
Model : -
Year(s) : -
Quantity : 0
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 26 Nov. 2019

Allwin21 Corp. AccuThermo AW 820V – Vacuum RTP

Wafer Size: Small~8 inch
Type: Stand Alone, Vacuum
Temperature: 100~800°C or 450~1250°C or 1250~1500°C
Gas Lines: 1 ~ 4 lines

SPECIFICATION
 Stand Alone and Manual loading of wafer into the oven
 Single wafer processing.
 Substrate: 2″, 3″, 4″,5″,6″,8″; Square or round; Transparent and Nontransparent
 Ramp up rate: Programmable, 10°C to 150°C per second.
 Recommended steady state duration: 0-600 seconds per step.
 Ramp down rate: Non-Programmable, 10°C to 150°C per second..
 Recommended steady state temperature range: 150°C – 1150°C
 Vacuum Pressure (Optional): 50 mtorr to 13 Torr or 13 Torr to 760 Torr
 Atmospheric function is optional
 Patented Temperature Sensor temperature accuracy: ±1°C.
 Thermocouple temperature accuracy: ±0.5°C
 Temperature repeatability: ±0.5°C or better at 1150°C
 Temperature uniformity: ±8°C across a 8″ (200mm) wafer at 1150°C

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