Allwin21
AMERICA North (USA-Canada-Mexico)
Allwin21 Corp. AccuThermo AW 820V – Vacuum RTP
Wafer Size: Small~8 inch
Type: Stand Alone, Vacuum
Temperature: 100~800°C or 450~1250°C or 1250~1500°C
Gas Lines: 1 ~ 4 lines
SPECIFICATION
Stand Alone and Manual loading of wafer into the oven
Single wafer processing.
Substrate: 2″, 3″, 4″,5″,6″,8″; Square or round; Transparent and Nontransparent
Ramp up rate: Programmable, 10°C to 150°C per second.
Recommended steady state duration: 0-600 seconds per step.
Ramp down rate: Non-Programmable, 10°C to 150°C per second..
Recommended steady state temperature range: 150°C – 1150°C
Vacuum Pressure (Optional): 50 mtorr to 13 Torr or 13 Torr to 760 Torr
Atmospheric function is optional
Patented Temperature Sensor temperature accuracy: ±1°C.
Thermocouple temperature accuracy: ±0.5°C
Temperature repeatability: ±0.5°C or better at 1150°C
Temperature uniformity: ±8°C across a 8″ (200mm) wafer at 1150°C