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ATV Technologie PEO 602

Ref : 2629235-9-CP
Condition : Used
Manufacturer : ATV Technologie
Model : PEO 602
Year(s) : 1994
Quantity : 1
Location : Seller or machines location:
EUROPE (Western and Northern)

This furnace can handle wafers up to 150mm
Configuration:
N2 - 1500 l/min
N2 - 660 l/min

Forming Gas 660l/min
Temperature Control 0°C – up to 500°C max.
Free Ramping (up to 99 steps max., one step up to 99,99 °C max.)
Stainless Steel Calotte 0 – 5kg

Number of Furnace Tubes 1
CE Marked YES
Condition Good

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