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Oxford Instruments Plasmalab System 100

Ref : 2306590-9-W
Condition : Used
Manufacturer : Oxford Instruments
Model : Plasmalab System 100
Year(s) : 2001
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Description PECVD TEOS with Load Lock
Wafer Size Range
Maximum 200 mm
Process PECVD & TEOS
Controller Type PC Controller Type
Loadlock
Loadlock Yes/No YES
Loadlock Pump Manufacturer & Model Alcatel APT 80 Turbo, ACT 200T Controller
RF Generator Model AE LF5 & AE RFX 600A
Automatch Text Oxford Instruments
Number of Gas Inputs Ten Gas

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