Cascade Microtech Summit 11000

• Wafer Size: up to 200 mm (8”)
• Probe Station Type: Manual, high-precision
• Measurement Environment:
– Integrated MicroChamber™ isolation chamber
– Low-noise, shielded, and light-tight for sensitive measurements
• Wafer Handling:
– Roll-out wafer stage for safe and easy wafer loading
• Chuck:
– 200 mm wafer chuck
– Temperature chuck installed (controller not included)
• Z-Lift:
– Linear lift range: 5.5 mm
– Repeatability: < 2 microns
• X-Y Stage Travel:
– 203 mm x 203 mm
– Resolution: 0.2″ per turn
• Microscope:
– Mitutoyo microscope
– One long working distance objective
– Microscope bridge with X-Y translation
• Manipulator Compatibility:
– Platen accepts vacuum or magnetic-base probe manipulators
• Compliance:
– CE marked