CEE Apogee 200

• Program Capacity: Unlimited user-defined steps per recipe
• Step Time Resolution: 0.1 second
• Maximum Step Time: 9999.9 seconds
• Maximum Spin Speed: 12000 rpm
• Maximum Acceleration Unloaded: 30000 rpm/s
• Maximum Acceleration with 200 mm Substrate: 13000 rpm/s
• Dispense Capability: Multiple simultaneous automated dispense
• Speed Control: In-process dynamic speed control
• Acceleration Control: In-process dynamic acceleration control
• Maximum Substrate Size Round: 200 mm
• Maximum Substrate Size Square: 6 in x 6 in
• Voltage: 110 V
• Frequency: 50/60 Hz
• Current: 6 A