Dainippon Screen SK-80BW-AVPE CD

Ref : 2726619-9-CP

Condition : Used

Manufacturer : Dainippon Screen

Model : SK-80BW-AVPE CD

Year(s) : 1995

Quantity : 1

Location : Seller or machines location:
EUROPE (Western and Northern)

AS-IS Refurbish
Wafer Size: 200mm
PROCESS: PHOTO
WAFER FLOW DIRECTION RIGHT TO LEFT
LOADING CONFIG 4 CASSETTE LOADING PORT
CASSETTE INDEX STATION 4 SIDE LOADING
LAYOUT 2 coater 2 developer
MAIN CONTROLLER NEC 9801
WAFER TRANSFER ROBOT 1 block system
PR RESIST PUMP waki bellows pump 4 set per 1 spin unit R

SUB UNIT Power unit
CCD
ETU
TCU

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