Dektak 3030, Surface Profiler
AMERICA North (USA-Canada-Mexico)
Brand: Dektak
Model: 3030, Surface Profiler
Measures vertical features
ranging in height from 131 micron to 50 angstroms on a variety of substrate surfaces
Used
Details:
Stylus: 12.5 um radius (Diamond)
Scan Range: x: 50 um − 50 mm; z: 100 A − 131 um z Resolution: 1 A/65 KA; 10 A/655 KA; 20 A/1310 KA
Force: 1 - 40mg
Zoom: 35x - 200x
Scan Speed Rangers: Low, Med, High
Leveling: Manual, Two point programmable or curso leveling
Stylus Tracking Force: Programmable, 1-40mg (0.01-0.4 milli Newtons) Max. Sample Thickness: 45mmMax
Sample Weight: 0.5Kg (1lb)
Sample Stage Diamete: 165mm
Sample Stage Translation: X Axis, + 76mm (from center); Y Axis, 76mm
Sample Stage Rotation: Theta, 360°
Power Requirements: 100/115/220Vac + 10%, 50-60Hz, 200VA
Warm-up Time: 15 mins recommended
Operating Temperature: 21°C + 3°C (70°F + 5°F)