Dektak 3030

Specifications:

Stylus:12.5 um radius (Diamond)
Scan Range: x:50 um - 50mm; z: 100 A - 131 um
z Resolution: 1A/65 KA; 10A/655 KA; 20A/1310A
Force: 1-40mg
Zoom: 35x-200x
Scan Speed Rangers: Low, Med, High
Leveling: Manual, Two point programmable or curso leveling
Stylus Tracking Force: Programmable, 1-40mg (0.01-0.4 milli Newtons)
Max. Sample Thickness: 45mm
Max Sample Weight: 0.5Kg (1lb)
Sample Stage Diameter: 165mm
Sample Stage Translation: X Axis, +76mm (from center); Y Axis, 76mm
Sample Stage Rotation: Theta, 360°
Power Requirements: 100/115/220Vac + 10%, 50-60Hz, 200VA