Hitachi CD SEM S-8620

- 6” single and double orientation flat holders
- Cursor and line profile measuring method
- 0.1um to 10um measuring range
- Throughput: 20wafers/hour by 5point measurement
- Optical microscope with x110 magnification and SEM images with x1’000 to x150k
- Automatic measurement with auto-adress /image recognition and manual measurement
- Two SMIF installed with random access mode and vacuum attraction chuck from CD-SEM
- Control unit with integrated image display, HDD (500MB), 3.5” FDD and 3.5” magneto optical drive including 80-column thermal head printer
- Data processing: Mean, standard deviation and Max/Min
- Needs N2 gas source, vacuum and compressed air
- Dimensions:
 Main unit: 1’170mm (W) x 1’890mm (D) x 1’650mm (H)
 Control unit: 600mm (W) x 1’331mm (D) x 1’800mm (H)
 Power unit: 535mm (W) x 600mm (D) x 1’500mm (H)
- Power supply: Single phase, 220V, 5kVA, 50Hz