Hitachi S-4160

Hitachi SEM S-4160

Performance:
Rresolution: 2.5 nm at 30kv
Magnification: 20X - 300KX

Electron Optics:
Electron gun: Cold field emmission source, 0.5 - 30 kV
Lens type: electromagnetic
Objective aperture: 4 position externally selectable
Stigmator: Octopole electromagnetic
Scanning coil: 2-stage electromagnetic

Sample Chamber
Size: 8" wafer exchangeable
Pump: Turbo pumped
Stage motion: 5 axis motor driven
X/Y: 150 mm, Z: 5-30 mm, T: 0 Deg - +45 Deg., R: 360 deg continuous

Display system:
Image display: Dual 12" monitors
* Option : Changeable into image capture system with LCD Color monitor

Vacuum system:
Full automatic operation with pneumatic valve control
Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber
Ion pump: 60 L/s X1, 20 L/s X2
Speciment chamber: DP (570 L/s)
Foreline: Rotary pump