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KLA-Tencor 5500 Surface Particle Inspection Analyzer
Ref :
1477189-9-W
Condition :
Used
Manufacturer :
KLA-Tencor
Model :
5500 Surface Particle Inspection Analyzer
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
24 Apr. 2020
1x, KLA-Tencor, 5500 Surface Particle Inspection Analyzer
Features:
Handles high scattering surfaces such as metals
polysilicon, and CVD films.
Map locations size available for each particle
Specifications:
Can handle from 2" to 8" wafers
Submicron sensitivity, detects 0.2 micron particles
Surface haze detected as low as 0.3 ppm
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