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KLA-Tencor Surfscan 6400
Ref :
2628782-9-AW
Condition :
Used
Manufacturer :
KLA-Tencor
Model :
Surfscan 6400
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
04 Oct. 2024
Bare Wafer Surface Defect Inspection System
The Surfscan 6400 is a highly advanced inspection system designed specifically for detecting defects on bare wafer surfaces./li>
System can handle up to 200mm capable
Cassette Handling: Single puck handling from single cassette or platform
Substrate Thickness: Automatic adjustment within 2 mm range
Material: Any surface that scatters less than 90% of incident light
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