KLA-Tencor Surfscan 6400

Bare Wafer Surface Defect Inspection System
The Surfscan 6400 is a highly advanced inspection system designed specifically for detecting defects on bare wafer surfaces./li>
System can handle up to 200mm capable
Cassette Handling: Single puck handling from single cassette or platform
Substrate Thickness: Automatic adjustment within 2 mm range
Material: Any surface that scatters less than 90% of incident light