KLA-Tencor 6100 Surfscan Analysis System

Ref : 1477221-9-W

Condition : Used

Manufacturer : KLA-Tencor

Model : 6100 Surfscan Analysis System

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 24 Apr. 2020

1x, KLA-Tencor 6100 Surfscan Analysis System

Unpatterned wafer surface contamination analyzer

Features:
Instantaneous magnified 3-D views of individual defects.
Color coded defect maps, histograms, and other graphics.
Surface haze detection.
Specifications:
Submicron sensitivity detects 0.16 micron particles
Capable of handling 4, 5, and 6 inch wafers.

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