KLA-Tencor 6200 Surfscan, Analysis System

Brand: KLA-Tencor
Model: 6200
ANALYSIS SYSTEM

Specifications
• Used
• Instantaneous mangified 3-D views of individual defects
• Color coded defect maps, histograms, and other graphics
• Surface haze detection
• Capable of handling 4", 5", 6" and 8" wafers.
• Laser type wavelength: ArIon 488 30mW
• Particle sensitivity: 0.10µm @ 95%
• Measurement range: 0.09 - 9999µm
• Haze sensitivity resolution: 0.05ppm
• Repeatability: 0.5% @ 1
• Throughput: 150wph (with 150mm wafers)