KLA-Tencor Surfscan 5500

Ref : 2259560-9-W

Condition : Used

Manufacturer : KLA-Tencor

Model : Surfscan 5500

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 13 Dec. 2023

- Can handle from 2" up to 8"/200mm wafers
- Submicron sensitivity, detects 0.2 micron particles
- Surface haze detected as low as 0.3 ppm.
- Handles high scattering surfaces such as metals, polysilicon and cvd films.
- Map locations and size available for each particle.
- Fully refurbished to meet original Surfscan 5500 specifications
- Operations Manual for KLA Surfscan 5500

The last engineer that worked on this system suspected a bad Below Wafer Mirror, or a bad Scanner PCB

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