KLA-Tencor Surfscan 5500
AMERICA North (USA-Canada-Mexico)
- Can handle from 2" up to 8"/200mm wafers
- Submicron sensitivity, detects 0.2 micron particles
- Surface haze detected as low as 0.3 ppm.
- Handles high scattering surfaces such as metals, polysilicon and cvd films.
- Map locations and size available for each particle.
- Fully refurbished to meet original Surfscan 5500 specifications
- Operations Manual for KLA Surfscan 5500
The last engineer that worked on this system suspected a bad Below Wafer Mirror, or a bad Scanner PCB