KLA-Tencor Surfscan 7600 Particle Inspection System

1x, KLA-Tencor Surfscan 7600 Particle Inspection System

A particle inspection tool - capable of up to 200mm wafers.

Specifications:
Particle sensitivity: 0.15um diameter latex spheres on bare silicon
and patterned process wafers.
Substrate speed: 2.6mm/s forward motion speed while scanning
Throughput: 30 wafers per hour for 8" wafers
Light source: Argon laser
Spatial resolution: 50um minimum spacing between particles.
Wafer rotation: System will accept up to ±3.0° pattern rotation relative
to the flat or notch