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KLA-Tencor Surfscan SP 1 DLS Unpatterened Surface Inspection
Ref :
2720605-9-C
Condition :
Used
Manufacturer :
KLA-Tencor
Model :
Surfscan SP 1 DLS Unpatterened Surface Inspection
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
- Refurbished
- 0.050 um Defect Sensitivity on Polished Bare Silicon
- Enhanced Rough Film Sensitivity
- Already upgraded with ENH SS laser
- Defect Map and Histogram with Zoom
- RTDC (Real Time Defect Classification)
- Map to Map
- Operator Interface
- Blower Unit
The tool is complete and in working order
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