Lam Rainbow 4500B XL 150mm Plasma Etch

Technical Specification – Etch Tool
System Model: LAM Rainbow XL (45xx Series)
Specific Model: 4526 XL
Process: Oxide Etch
Wafer Size: 150 mm (JEIDA flat)
Valve Type: VAT 65
Electrostatic Chuck (ESC): Yes

Tool Configuration
Bulkhead: Installed
Endpoint Detection: Monochromator (Yes)
Software: Envision v1.6.1-005

RF Sources:
ENI GHW-50 (13.56 MHz)
ENI 2 MHz supply
RF Cart: Present

ISO Module: No
AC Distribution: AC Box -002 (with breakers)

Process Gas Setup – Chamber 1
Argon (Ar): 500 sccm
CF₄: 20.0 sccm
CHF₃: 20.0 sccm
C₄F₈: 19.5 sccm
CO: 200.0 sccm
O₂ (Low Range): 20.0 sccm
O₂ (High Range): 1000.0 sccm
N₂: 95 sccm


Wafer Handling
Robot Type: Harmonic Drive
Loader: Hine Indexers 38A
Loadlock: Dual (Entrance & Exit)

Vacuum & Exhaust
Turbo Pumps: HGP pumps on loadlocks
Pump Controllers: HGP controller set

Control & Power
Gas Box: Installed
AC Rack: Yes (local power box, located in basement)

Condition
Missing/Defective Parts: None reported