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LAM TCP 9600SE
Ref :
2807178-9-W
Condition :
Used
Manufacturer :
LAM
Model :
TCP 9600SE
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Metal Etch
Etch/Ash/Clean - Plasma Processing
Currently Configured for: 200mm
Software: Envision 2.0-068
Main Chamber - Fixed Gap ESC - Metal Etch
ESC - Anodized Aluminum
VAT 65 Pressure Controller
Edwards 1303
CV80 High Temp Turbo
PLL - DSQ Strip Chamber
APM - Atmospheric passivation
Heated Paddle
(1)Orbital Weld Gas Box
(3) - Unit UFC 1200A
(4) - Unit 1661 Multiflow
(1) - Horiba Z300
(1) - Tylan VC-4900VRH
Lam Harmonic arm drives
(2)Dry Pumps:Busch BA100
(1)Edwards iQDP80
(1)Edwards iQDP80 w/Leybold WSU501 Blower
(1)Chillers:M and W Single Ch TCU - RPCX28A-3.OHE-RNB
Remote AC BoxDelatech SD101 Wet Scrubber
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