Lam Research TCP 9600SE

Ref : 2806509-9-W

Condition : Used

Manufacturer : Lam Research

Model : TCP 9600SE

Year(s) : -

Quantity : 1

Location : Seller or machines location:
EUROPE (Western and Northern)

Metal Etch
Etch/Ash/Clean - Plasma Processing
Currently Configured for: 200mm
Software: Envision 2.0-068
Main Chamber - Fixed Gap ESC - Metal Etch
ESC - Anodized Aluminum
VAT 65 Pressure Controller
Edwards 1303CV80 High Temp Turbo
PLL - DSQ Strip Chamber
APM - Atmospheric passivation
Heated Paddle (1)
Orbital Weld Gas Box
(2) - Unit 1661 Multiflow
(2) - Unit UFC 1200A
(2) - Horiba Z500
(1) - Mykrolis VC-4900VRH
Lam Harmonic arm drives (2)
Dry Pumps:
Busch BA100 (1)
Edwards iQDP80 (1)
Edwards iQDP80 w/Leybold WSU501 Blower (1)
Chillers:
M and W Single Ch TCU - RPCX28A-3.OHE-RNB
Remote AC Box
Ecosys 3500 Ultra Wet scrubber

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