Lam Research 490

Wafer Size Range
Minimum 75 mm
Maximum 200 mm
Set Size 150 mm
Process Nitride Etch
Controller Type Microprocessor Controller Type
Cassette to Cassette YES
Loadlock
Loadlock Yes/No YES
Loadlock Pump Manufacturer & Model EBARA A10S
Roughing Pump EBARA A70W
RF Generator Model OEM 650A
Automatch Text ENI 650W 13.56 MHz
Number of Gas Inputs Five Gas
Chillers
Number of Chillers 1
Chiller #1Manufacturer/Model M&W SYSTEMS RPCE 18A
Condition Very Good
Exterior Dimensions
Width 45.000 in (114.3 cm)
Depth 45.000 in (114.3 cm)
Height 66.000 in (167.6 cm)
Weight 918 lb (416 kg)