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Lam Research 490

Ref : 2545559-9-CP
Condition : Used
Manufacturer : Lam Research
Model : 490
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 03 Feb. 2024

Wafer Size Range
Minimum 75 mm
Maximum 200 mm
Set Size 150 mm
Process Nitride Etch
Controller Type Microprocessor Controller Type
Cassette to Cassette YES
Loadlock
Loadlock Yes/No YES
Loadlock Pump Manufacturer & Model EBARA A10S
Roughing Pump EBARA A70W
RF Generator Model OEM 650A
Automatch Text ENI 650W 13.56 MHz
Number of Gas Inputs Five Gas
Chillers
Number of Chillers 1
Chiller #1Manufacturer/Model M&W SYSTEMS RPCE 18A
Condition Very Good
Exterior Dimensions
Width 45.000 in (114.3 cm)
Depth 45.000 in (114.3 cm)
Height 66.000 in (167.6 cm)
Weight 918 lb (416 kg)

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