LAM TCP 9600SE

Metal Etch
Etch/Ash/Clean - Plasma Processing
Currently Configured for: 200mm
Software: Envision 2.0-068Main Chamber
- Fixed Gap ESC
- Metal EtchESC
- Anodized AluminumVAT 65 Pressure ControllerLeybold Mag1500 High Temp TurboPLL
- DSQ Strip ChamberAPM
- Atmospheric passivation
Heated Paddle (1)Orbital Weld Gas Box(3)
- Unit UFC 1200A(2)
- Unit 1661 Multiflow(2)
- Horiba Z500(1) - Horiba Z300(1)
- Tylan VC-4900VRH
Lam Harmonic arm drives (2)
Dry Pumps:Busch BA100 (1)
Edwards iQDP80 (1)
Edwards iQDP80 w/Leybold WSU501 Blower (1)
Chillers:M and W Single Ch TCU
- RPCX28A-3.OHE-RNB
Remote AC Box
Ecosys 3500 Ultra Wet scrubber