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LAM 9600
Ref :
2257608-9-MT
Condition :
Used
Manufacturer :
LAM
Model :
9600
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
13 Dec. 2023
Mounting Bulkhead
Wafer Size 200 MM
Software Envision 1.52
Indexers HINE
AC Box -001
Gas Box Orbital Welded
Clamping ESC
Backside Helium Closed Loop
Generator 3 RFG 1250
RF Match Upper TCP, Lower Mini Match, DSQ Match
Turbo SEKO SEKI 1000L
Turbo Controller SEKI SEKI STP
VAT Gate VAT 65
VAT Controller PM-7
Endpoint Dual Endpoint 703nm and 520nm
DSQ Hinged
WVDS Auto Fill
APM Standard
MFCs Unit 1660
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