March Instruments PM-600

Rated Power Output 300 Watts
Reactor Center Cylindrical
Reactor Center Size
Depth 12.00 in (30.48 cm)
Diameter 10.00 in (25.40 cm)
Reactor Center Material Quartz
Number of Gas Inputs Two Gas
Automatching Network Included Yes
Vacuum Pump Included Yes
Vacuum Pump Model Varian SD-200
RF Generator Model Seren IPS R300
Accessories (1) Quartz Lattice Tray
Door with viewing window
Other Information Automatic and Manual Modes
Operating Frequency: 13.56 MHz
Power Requirements 115 V 60 Hz 1 Phase
Exterior Dimensions
Width 23.000 in (58.4 cm)
Depth 22.000 in (55.9 cm)
Height 17.000 in (43.2 cm)