March Instruments PX-500

Etcher Type Box
Rated Power Output 600 Watts
Reactor Center Rectangular
Reactor Center Size
Width 12.00 in (30.48 cm)
Depth 12.00 in (30.48 cm)
Height 20.00 in (50.80 cm)
Reactor Center Material Aluminum
Number of Gas Inputs Two Gas
Automatching Network Included Yes
Vacuum Pump Included No
External Cooling Forced Air Cooled
Accessories

1 Grounded Electrode (Perforated Shelf)
1 Powered Electrode (Shelf)
Nor-Cal KF 50 Vacuum Valve
Extended Description Details at March Nordson PX-500 Box Plasma Etcher.pdf
Power Requirements 110 V 20.0 A 50/60 Hz 1 Phase
Exterior Dimensions
Width 26.000 in (66.0 cm)
Depth 20.000 in (50.8 cm)
Height 30.500 in (77.5 cm)
Weight 185 lb (84 kg)