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Matrix

Ref : 1834322-9-GO
Condition : Used
Manufacturer : Matrix
Model : -
Year(s) : -
Quantity : 0
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 13 Jun. 2018

Matrix 303 Etcher

*Programmable microprocessor controlled system
*Capable of handling wafer sizes from 2 in. to 6 in
*Cassette loading
*ENI OEM-6XL 13.56 Mhz
*600W RF Generator
*Temperature controlled
*Previous gases used: NF3, O2, N2, He. 200/240V, 1 Ph, 50/60 Hz
*Used for Isotropic etches such as Nitride, Poly and Oxides

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