Others

Ref : 1841315-9-W

Condition : Used

Manufacturer : Others

Model : -

Year(s) : -

Quantity : 0

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 17 Apr. 2024

Brand: Allwin21 Corp.
Allwin21 Corp. AW-105R Plasma Asher

Wafer Size: 2″ – 6″ Capability
Wafer Loading: 3-axis Robot; Stationary Cassette Plate
Plasma Power: 600W Air-Cooled RF 13.56MHz
Type: Parallel/Single Wafer Process; Stand-Alone
Gas Lines: 1-3 Lines MFCs

Specifications

Rate: 0.5-1.5 um/min at 200 to 250 ºC, bulk strip.600 A/min at 100 ºC, Descum
Removal Uniformity:

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