AMERICA North (USA-Canada-Mexico)
Brand: Allwin21 Corp.
Allwin21 Corp. AW-B3000 Plasma Asher
Wafer Size: Small~8″ Wafers
Wafer Loading: Manual
Plasma Power: Air-Cooled RF 13.56MHz
Type: Barrel/Batch, Desktop or Stand Alone
Gas Lines: 1-3 Lines
2 ” to 8 ” substrate.
Up to three gas lines with three MFC(Customized)
One New Computer with touch screen.
One New Controller Box
One New Touch Screen Monitor with keyboard, mouse.
One 13.56 MHz ENI RF Generator or Equivalent for up to 1200W
New Allwin21 Corp proprietary AW software with PC control for Branson/IPC 3000/2000
Baratron Gauge to read the pressure to keep the process repeatable
Throttle valve to control the pressure to keep the process repeatable