Others

Brand: Allwin21
AW-1008 Plasma Stripper/Asher

Wafer Size: 3″ – 6″ Capability
Wafer Loading: 3-axis Robot
Plasma Power: Microwave
Type: Parallel/Single Wafer Process; Stand-Alone
Gas Lines: 1-4 Lines

Specifications:
Downstream Plasma. 8µ / min
1000W Microwave Power (1.25kW w/ Variable MW Power option available)
Small footprint. 32″w x 32″d x 64″h
75mm – 150mm wafer capability.
Up to 4 MFC’s.
End-of- Process (EOP) process endpoint detection.
Pressure control.
GEM/SECSII (option).
Floor or Through-the-wall design.