Mattson Aspen II ICP

Main frame. Cables 64*76*78
AC power rack 26*18*66
Utility box 25*20*75
RF rack 22*26*55
Chiller. Cables 33*25*55
Transformer 24*24*30
Parts box-1 : spare parts, Tool Manual 28*20*16
Parts box-2 : spare parts, Tool Manual 28*20*16
Parts box-3 : spare parts, Tool Manual 28*20*16

WAFER SIZE: 8"
SMIF : NONE
PROGRESS TYPE: PR ASHER
CHAMBER POSITION: BACK CHAMBER : ICP ASHER (Lower stage light etch)
IDE CHAMBER : ICP ASHER
ROBOT : MATTSON STANDARD DUAL ARM
BACK CHAMBER
-PROCESS : PR ASHER
-TUBE MATERIAL : QUARTZ
-RF GENERATOR : AE, RFPP 30S
-RF MATCHER : TRAZAR, AMU10D-3
-PRESSURE GUAGE : CMLB-11506
-THROTTLE VALVE : MDV018
-THROTTLE VALVE CONTROLLER : ACX120103
-TEMP CONTROLLER : MIC 2000, PARTLOW
-GAS BOX
GAS-1 : O2, 10000SCCM
GAS-2 : O2, 200SCCM
GAS-3 : CF4, 50SCCM
GAS-4 : H2/N2, 3000SCCM
SIDE CHANBER
-PROCESS : PR ASHER
-TUBE MATERIAL : QUARTZ
-RF GENERATOR : AE, RFPP 30S
-RF MATCHER : TRAZAR, AMU10D-3
-PRESSURE GUAGE : CMLB-11506
-THROTTLE VALVE : MDV018
-THROTTLE VALVE CONTROLLER : ACX120103
-TEMP CONTROLLER : MIC 2000, PARTLOW
-GAS BOX
GAS-1 : O2, 5000SCCM
GAS-2 : O2, 200SCCM
GAS-3 : CF4, 300SCCM
GAS-4 : H2/N2, 3000SCCM
DRY PUMP : None
CHILLER : EXH-1004 ( RISSHI CO LTD )-BACK CHAMBER ONLY
UTILITY BOX : NOT OEM, PCW DISTRIBUTION
TRANSFORMER : NOT OEM,200VAC=>100VAC