Mattson Aspen III Dual Chamber ICP Ashers

MATTSON Aspen III Dual Chamber ICP Ashers, configured for 8"
8" / 12" platform
Single Wafer
Process: Plasma Stripper
Power Requirements: V 208, Phase 3, 5-wire, Freq 50/60Hz
Ultraclean Mini-environment (Blower Unit)
SECS II / GEM
Status Lamp (3-Color)
Universal Remote AC Box
208 V, Phase 3, 5-wire, Freq 50 / 60Hz

Wafer Handling:
2 Asyst Versaport Integrated SMIF
4-Paddle

Process Chambers:
Position B & C: Highland ICP
AE RFX600A
Chuck Type: Pedestal
High-Temp Heater Block
Turbo: Osaka TG1813BW-90

Chamber Gas Config (both chambers):
Gas Line: Gas: Size(sccm): MFC Type:
#1:Ch-B and C N2 200 Aera FC-D985C
#2:Ch-B and C CF4 100 Aera FC-D985C
#3:Ch-B and C O2 1000 Aera FC-D985C
#4:Ch-B and C O2 100 Aera FC-D985C
#5:Ch-B and C H2 100 Aera FC-D985C
#6:Ch-B and C Ar 500 Aera FC-D985C
#7:Ch-B and C CH2F2 100 Aera FC-D985C
#8:Ch-B and C NH3 200 Aera FC-D985C

Options:
2 Way Slit Door
Blade Assembly w/Fluorosilicon O-Rings
Universal Remote AC Box
CE Marked

Has been recently deinstalled, crated and moved to a warehouse.
It comes with a second parts tool that is included in the price.