Metroline / IPC M4L

Rated Power Output 1000 Watts
Chamber Construction Aluminum/box
Chamber Size
Width 13.00 in (33.02 cm)
Depth 17.00 in (43.18 cm)
Height 9.00 in (22.86 cm)
Number of Gas Inputs Three Gas
Automatching Network Included Yes
Vacuum Pump Included Yes
RF Generator Model Seren
Accessories

(3) Shelves Included
Leybold D25B Vacuum Pump
Other Information

Windows based software
LCD touch panel,keyboard
Process under computer control
Built-in statistics and data gathering to disk
64 Process steps
Vacuum conection: KF 40
Gases: O2, AR, N2
MKS Throttle valve
Vacuum connection hose
Power Requirements 120 V 30.0 A 60 Hz 1 Phase
CE Marked YES
Exterior Dimensions
Width 28.000 in (71.1 cm)
Depth 31.500 in (80.0 cm)
Height 30.000 in (76.2 cm)
Weight 613 lb (278 kg)