Plasmatherm Versaline

Ref : 2809460-9-W

Condition : Used

Manufacturer : Plasmatherm

Model : Versaline

Year(s) : 2016

Quantity : 1

Location : Seller or machines location:
EUROPE (Western and Northern)

3 chamber (ICP etch) PT Versaline
BCl3 and Cl2 gases which would suggest InP or GaAs or GaN.
Wafer size is 6 inch
It is complete and functional prior to deinstall

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