Plasmatherm BT 6" RIE MF

Wafer Size Range
Maximum 150 mm
Process Reactive Ion Etch System
Controller Type PC Controller Type
High Vacuum Pump Turbo Pump
Roughing Pump Edwards RV 12
RF Generator Model RFPP 5S
Number of Gas Inputs Four Gas
Chillers
Number of Chillers 0
Accessories
Edwards RV 12 mechanical pump
Leybold TurboVac 151 Turbo Pump with NT 150/360 Controller
(1) MKS Model 153 Throttle Valve
(4) MKS Mass Flow Controllers
Computer, monitor, keyboard
Chiller is NOT included