Nikon BW-A505（MM-800LU）

specifications
-Piezo drive method: Revolver drive
・ Piezo scanning range: 100 μm * Measurement is about 90 μm
・ XYZ axis drive: Each manual * Piezo drive unit is electric
-Measurement optical system: White two-luminous flux interferometer
・ Two-luminous flux interference objective lens: 10, 20, 50, 100 ×
・ Myrson type interference lens: 2.5, 5 × * Includes a single holder for the objective lens (for mounting one)
・ Objective lens for visual field confirmation: 5 ×
・ Effective height resolution: 8 nm (when measuring 8 μm steps)