Nikon Optistation 3A

Vintage: 01.05.1997
Cassette to Cassette Handling of 200mm Wafers
Non-Contact Wafer Pre-Alignment
Trinocular Head with Motorized Nosepiece and
Motorized Auto Focus
NIKON BD Plan Objectives: 5X, 20X & 40X
NIKON BD Plan APO Objective: 100X
NIKON 10X Widefield Eyepieces
EPI Illuminator (Brightfield/Darkfield)
with 50 Watt Halogen Lamp
8” (dia.) Wafer Stage with 8" x 8" XY Programmable Motion &
Joystick Manual Override
Observing Points – 150 Channels with Max. 50 Point Memory
per Channel
2ea X Axis Wafer Transfer Shuttles
2ea Y Axis Wafer Transfer Shuttles
2ea Send/Receive Cassette Elevators